New Stylus Profiler Enables Semi-Automated Measurements with
Uncompromised 300mm Access
BILLERICA, Mass.--(BUSINESS WIRE)--
Bruker (NASDAQ: BRKR) today announced the release of the Dektak
XTL Stylus Profiler, extending its industry-leading stylus
profilometry capabilities to 200 and 300 millimeter semiconductor wafer
fabs and next-generation touch panel manufacturers. The system provides
the most cost-effective, full 300-millimeter wafer solution for
characterizing thin film step heights, resist step heights, line edge
roughness, CMP dishing and erosion, as well as roll off amount (ROA).
The Dektak XTL combines decades of stylus innovation with
new features targeting QA/QC environments to enable increased accuracy
and minimal operator intervention between loading and unloading samples.
Bruker Dektak XTL (Photo: Business Wire)
“Bruker’s Dektak XTL with a 12-inch stage is the most advanced system in
its class,” said
Roger Lee
, Integration Department Project Director for
China Wafer Level CSP Co., Ltd. (WLCSP). “The system is stable and
reliable, and it incorporates many powerful functionalities and
ease-of-use features. Bruker’s stylus profilers always lead the industry
in technology, and they always meet our metrology requirements in
production.”
“Customers like WLCSP have been asking for a larger scale stylus
measurement system to support their latest 300mm wafer factory needs
with the accuracy and industry-proven repeatability of our traditional
Dektak products,” added
Kent Heath
, General Manager of Bruker’s Stylus
and Optical Metrology business unit. “With the Dektak XTL
we have delivered on this need with its 5 nanometer repeatability, and
we have built-in a new level of point-and-click automation for maximum
productivity that is unrivaled in the industry. Our early access
customers have been amazed by how intuitive it is to use for production
and development applications.”
About Dektak XTL
The Dektak XTL features a small footprint with pneumatic
passive isolation and a fully enclosed workstation with a wide, easily
accessible interlocking door, making it suitable for demanding
production floor environments. Its dual-camera architecture enables
enhanced spatial awareness, and its high level of automation maximizes
manufacturing throughput. Bruker’s exclusive Vision64® Advanced
Production Interface (API) with pattern recognition optimizes the system
for stringent QA/QC requirements and makes data collection an intuitive
and repeatable process, minimizing operator-to-operator variability.
About Bruker Corporation (NASDAQ: BRKR)
Bruker Corporation is a leading provider of high-performance scientific
instruments and solutions for molecular and materials research, as well
as for industrial, diagnostics and applied analysis. For more
information about Bruker Corporation, visit www.bruker.com.
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Source: Bruker Corporation