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Bruker Announces Order for D8 FABLINE and D8 DISCOVER X-ray Metrology Tools from SEMATECH at UAlbany NanoCollege

July 08, 2009

ALBANY, New York & MADISON, Wis.--(BUSINESS WIRE)--Jul. 8, 2009-- Bruker AXS, the market leader in X-Ray Diffraction (XRD) instrumentation, is pleased to announce that SEMATECH, the global consortium of semiconductor chip-makers, has ordered the Bruker X-ray tools D8 FABLINE™ and D8 DISCOVER™ for the X-ray metrology site at the College of Nanoscale Science and Engineering (CNSE) of the University at Albany. This new suite of equipment provides SEMATECH’s metrology program at CNSE’s Albany NanoTech Complex with lab-to-fab X-ray metrology development capability to address the challenges of advanced semiconductor process control and new materials characterization.

The D8 FABLINE provides fully automated handling of 300mm wafers under Class 1 clean room conditions. It provides a wide spectrum of techniques, such as rapid X-ray reflectivity (XRR), grazing incidence X-ray diffraction (GID), and high-resolution X-ray diffraction (HR-XRD) in order to facilitate advanced process development and control on strained devices and high-K thin films, as well as materials characterization for future generation technology nodes.

The D8 DISCOVER is a multi purpose X-ray diffraction platform, designed for high performance materials research and methodology development. The system features the state-of-the-art technology, including the capability to perform in-plane grazing incidence diffraction (IP-GID). New methodologies developed on this laboratory platform will be directly portable to the D8 FABLINE tool to facilitate implementation in the fabs.

Dr. Brad Thiel, CNSE Associate Professor of Nanoscience and Director of SEMATECH’s Advanced Metrology Development Program at the UAlbany NanoCollege, said, “The purchase of Bruker’s state-of-the-art XRD systems, combined with the R&D capabilities and know-how of both SEMATECH and CNSE, will bring significant benefits to nanoelectronics manufacturers by pinpointing device failures and improving advanced process control. The addition of these cutting-edge tools provides enhanced resources at CNSE’s Albany NanoTech to support the critical needs of our global corporate partners and the nanoelectronics industry.”

Dr. Assunta Vigliante, Bruker AXS Business Development Manager for Semiconductor Solutions, commented: “We are pleased and proud to be working with SEMATECH on X-ray metrology solutions for future technology nodes. Since SEMATECH represents many of the leading worldwide semiconductor manufacturers, this is an important opportunity for Bruker to enable innovation and provide broad support for the global semiconductor industry. As X-ray metrology becomes an important technology in the semiconductor industry, Bruker is committed to providing reliable world-class solutions for the industry’s analytical and metrology challenges. We look forward to a long-term collaboration.”


For over 20 years, SEMATECH® ( has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Today, SEMATECH continues accelerating the next technology revolution with its nanoelectronics and emerging technology partners.

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About CNSE. The UAlbany CNSE is the first college in the world dedicated to education, research, development, and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience, and nanoeconomics. CNSE’s Albany NanoTech Complex is the most advanced research enterprise of its kind at any university in the world. With over $5 billion in high-tech investments, the 800,000-square-foot complex attracts corporate partners from around the world and offers students a one-of-a-kind academic experience. The UAlbany NanoCollege houses the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 80,000 square feet of Class 1 capable cleanrooms. More than 2,500 scientists, researchers, engineers, students, and faculty work on site at CNSE’s Albany NanoTech, from companies including IBM, AMD, GlobalFoundries, SEMATECH, Toshiba, Applied Materials, Tokyo Electron, ASML, Vistec Lithography and Atotech. For more information, visit

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Source: Bruker AXS

Bruker AXS
Dr. Assunta Vigliante, +49 (721) 595 8470
Business Development Manager

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