ALBANY, New York & MADISON, Wis.--(BUSINESS WIRE)--Jul. 8, 2009--
Bruker AXS, the market leader in X-Ray Diffraction (XRD)
instrumentation, is pleased to announce that SEMATECH, the global
consortium of semiconductor chip-makers, has ordered the Bruker X-ray
tools D8 FABLINE™ and D8 DISCOVER™ for the
X-ray metrology site at the College
of Nanoscale Science and Engineering (CNSE) of the University at Albany.
This new suite of equipment provides SEMATECH’s metrology program at
CNSE’s Albany NanoTech Complex with lab-to-fab X-ray metrology
development capability to address the challenges of advanced
semiconductor process control and new materials characterization.
The D8
FABLINE provides fully automated handling of 300mm wafers
under Class 1 clean room conditions. It provides a wide spectrum of
techniques, such as rapid X-ray reflectivity (XRR), grazing incidence
X-ray diffraction (GID), and high-resolution X-ray diffraction (HR-XRD)
in order to facilitate advanced process development and control on
strained devices and high-K thin films, as well as materials
characterization for future generation technology nodes.
The D8
DISCOVER is a multi purpose X-ray diffraction platform,
designed for high performance materials research and methodology
development. The system features the state-of-the-art technology,
including the capability to perform in-plane grazing incidence
diffraction (IP-GID). New methodologies developed on this laboratory
platform will be directly portable to the D8 FABLINE tool
to facilitate implementation in the fabs.
Dr. Brad Thiel, CNSE Associate Professor of Nanoscience and Director of
SEMATECH’s Advanced Metrology Development Program at the UAlbany
NanoCollege, said, “The purchase of Bruker’s state-of-the-art XRD
systems, combined with the R&D capabilities and know-how of both
SEMATECH and CNSE, will bring significant benefits to nanoelectronics
manufacturers by pinpointing device failures and improving advanced
process control. The addition of these cutting-edge tools provides
enhanced resources at CNSE’s Albany NanoTech to support the critical
needs of our global corporate partners and the nanoelectronics industry.”
Dr. Assunta Vigliante, Bruker AXS Business Development Manager for
Semiconductor Solutions, commented: “We are pleased and proud to be
working with SEMATECH on X-ray metrology solutions for future technology
nodes. Since SEMATECH represents many of the leading worldwide
semiconductor manufacturers, this is an important opportunity for Bruker
to enable innovation and provide broad support for the global
semiconductor industry. As X-ray metrology becomes an important
technology in the semiconductor industry, Bruker is committed to
providing reliable world-class solutions for the industry’s analytical
and metrology challenges. We look forward to a long-term collaboration.”
About SEMATECH:
For over 20 years, SEMATECH® (www.sematech.org)
has set global direction, enabled flexible collaboration, and bridged
strategic R&D to manufacturing. Today, SEMATECH continues accelerating
the next technology revolution with its nanoelectronics and emerging
technology partners.
About Bruker AXS:
For more information about Bruker AXS and Bruker Corporation (NASDAQ:
BRKR), please visit www.bruker.com.
About CNSE. The UAlbany CNSE is the first college in the world
dedicated to education, research, development, and deployment in the
emerging disciplines of nanoscience, nanoengineering, nanobioscience,
and nanoeconomics. CNSE’s Albany NanoTech Complex is the most advanced
research enterprise of its kind at any university in the world. With
over $5 billion in high-tech investments, the 800,000-square-foot
complex attracts corporate partners from around the world and offers
students a one-of-a-kind academic experience. The UAlbany NanoCollege
houses the only fully-integrated, 300mm wafer, computer chip pilot
prototyping and demonstration line within 80,000 square feet of Class 1
capable cleanrooms. More than 2,500 scientists, researchers, engineers,
students, and faculty work on site at CNSE’s Albany NanoTech, from
companies including IBM, AMD, GlobalFoundries, SEMATECH, Toshiba,
Applied Materials, Tokyo Electron, ASML, Vistec Lithography and Atotech.
For more information, visit www.cnse.albany.edu.
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Source: Bruker AXS
Bruker AXS
Dr. Assunta Vigliante, +49 (721) 595 8470
Business
Development Manager
assunta.vigliante@bruker-axs.de